We are developing integrated external cavity lasers (ECLs) for applications in trace gas sensing. Shown below is a prototype of a MEMS rotary comb actuator that will be used to tune the laser.

Below you can see a MEMS fabricated actuator with a virtual pivot point. Note that these are pictures of the actual device, not drawings.

Click here to see a movie of the virtual pivot point actuator.

Here is our first funtioning prototype of a comb actuator.

Click here to see a video of the functioning rotary comb actuator. The length of the device is about 1.5 mm. The width of the comb fingers is about 7 μm.